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The design of the ultrasonic vibrating systems with multi-p..:

, In: International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices,
Khmelev, Vladimir N. ; Khmelev, Sergey S. ; Levin, Sergey V.. - p. 174-178 , 2012
Link: https://doi.org/10.1109/EDM.2012.6310211