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Chemically assisted ion beam etching of optical microresona..:

, In: Conference Proceedings. LEOS '97. 10th Annual Meeting IEEE Lasers and Electro-Optics Society 1997 Annual Meeting,
Scherer, A. ; Cheng, C.C. ; Painter, O.... - p. 98 vol.2 , 1997
Link: https://doi.org/10.1109/LEOS.1997.645277