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MEMS sensor array platform integrated with CMOS based optic..:

, In: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS),
Erarslan, Refik Burak ; Lulec, Sevil Zeynep ; Adiyan, Ulas... - p. 181-184 , 2013
Link: https://doi.org/10.1109/MEMSYS.2013.6474207