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A study of the mechanical reliability of a MEMS microphone:

, In: Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
Fang, Wenxiao ; Huang, Qinwen - p. 716-719 , 2013
Link: https://doi.org/10.1109/IPFA.2013.6599261