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1 Ergebnisse
1
Analysis of cotton-like silica contaminants induced by oxyg..:
, In:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
,
She, D. D.
;
Zhao, L. R.
;
Wang, Z. Q.
.. - p. 135-138 , 2013
Link:
https://doi.org/10.1109/Transducers.2013.6626720
RT T1 <cTitle>2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)</cTitle>: T1 <Title>Analysis of cotton-like silica contaminants induced by oxygen containing plasma stripping of organic structures on silicon wafer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-6626720&Exemplar=1&LAN=DE A1 She, D. D. A1 Zhao, L. R. A1 Wang, Z. Q. A1 Ma, X. Y. A1 Wu, W. G. YR 2013 SN 2164-1641 SN 2159-547X K1 Plasmas K1 Etching K1 Silicon K1 Resists K1 Silicon compounds K1 Substrates K1 Polymers K1 Oxygen plasma stripping K1 cotton-like silica residues K1 organic structure K1 formation mechanism SP 135 OP 138 LK http://dx.doi.org/https://doi.org/10.1109/Transducers.2013.6626720 DO https://doi.org/10.1109/Transducers.2013.6626720 SF ELIB - SuUB Bremen
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