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1 Ergebnisse
1
Oxygen induced limitation on grain growth in RF sputtered I..:
, In:
IEEE International Conference on Electro-Information Technology , EIT 2013
,
Lamsal, Buddhi Sagar
;
Huh, Yung
;
Dubey, Mukul
... - p. 1-4 , 2013
Link:
https://doi.org/10.1109/EIT.2013.6632655
RT T1
IEEE International Conference on Electro-Information Technology , EIT 2013
: T1
Oxygen induced limitation on grain growth in RF sputtered Indium tin oxide thin films
UL https://suche.suub.uni-bremen.de/peid=ieee-6632655&Exemplar=1&LAN=DE A1 Lamsal, Buddhi Sagar A1 Huh, Yung A1 Dubey, Mukul A1 Manoj, K C A1 Venkatesan, Swaminathan A1 Qiao, Qiquan A1 Galipeau, David A1 Fan, Qi Hua YR 2013 SN 2154-0373 SN 2154-0357 K1 Indium tin oxide K1 Films K1 Substrates K1 Argon K1 Temperature K1 Grain size K1 Radio frequency SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EIT.2013.6632655 DO https://doi.org/10.1109/EIT.2013.6632655 SF ELIB - SuUB Bremen
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