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1 Ergebnisse
1
Process development to enable 3D IC multi-tier die bond for..:
, In:
2014 IEEE 64th Electronic Components and Technology Conference (ECTC)
,
Hu, Y. H.
;
Liu, C. S.
;
Chen, M. T.
... - p. 572-575 , 2014
Link:
https://doi.org/10.1109/ECTC.2014.6897342
RT T1
2014 IEEE 64th Electronic Components and Technology Conference (ECTC)
: T1
Process development to enable 3D IC multi-tier die bond for 20μM pitch and beyond
UL https://suche.suub.uni-bremen.de/peid=ieee-6897342&Exemplar=1&LAN=DE A1 Hu, Y. H. A1 Liu, C. S. A1 Chen, M. T. A1 Cheng, M. D. A1 Kuo, H. J. A1 Lii, M. J. A1 La Manna, A. A1 Rebibis, K. J. A1 Wang, T. A1 Huylenbroeck, S. V. A1 Daily, R. A1 Capuz, G. A1 Velenis, D. A1 Beyer, G. A1 Beyne, E. A1 Yu, Doug C. H. YR 2014 SN 0569-5503 SN 2377-5726 K1 Bonding K1 Through-silicon vias K1 Three-dimensional displays K1 Force K1 Stacking K1 Nails K1 Surface treatment SP 572 OP 575 LK http://dx.doi.org/https://doi.org/10.1109/ECTC.2014.6897342 DO https://doi.org/10.1109/ECTC.2014.6897342 SF ELIB - SuUB Bremen
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