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1 Ergebnisse
1
Polymer material grating used on contactless sub-wavelength..:
, In:
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
,
Tseng, Kuo-Chun
;
Lin, Te-Hsun
;
Modsching, Norbert
.. - p. 592-595 , 2014
Link:
https://doi.org/10.1109/NEMS.2014.6908881
RT T1
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
: T1
Polymer material grating used on contactless sub-wavelength MEMS physical sensors
UL https://suche.suub.uni-bremen.de/peid=ieee-6908881&Exemplar=1&LAN=DE A1 Tseng, Kuo-Chun A1 Lin, Te-Hsun A1 Modsching, Norbert A1 Fang, Wei-Leun A1 Fu, Chien-Chung YR 2014 K1 Gratings K1 Structural beams K1 Laser beams K1 Fabrication K1 Optical sensors K1 Polymers K1 MEMS physical sensors K1 Wire-grid polarizer K1 Laser Interference Lithography SP 592 OP 595 LK http://dx.doi.org/https://doi.org/10.1109/NEMS.2014.6908881 DO https://doi.org/10.1109/NEMS.2014.6908881 SF ELIB - SuUB Bremen
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