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1 Ergebnisse
1
Influence of the excitation frequency increase on a fluid m..:
, In:
2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS)
,
Leszczynski, S.
;
Strobel, C.
;
Albert, M.
.. - p. 1-1 , 2014
Link:
https://doi.org/10.1109/PLASMA.2014.7012209
RT T1
2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS)
: T1
Influence of the excitation frequency increase on a fluid model of the capacitively coupled argon plasma
UL https://suche.suub.uni-bremen.de/peid=ieee-7012209&Exemplar=1&LAN=DE A1 Leszczynski, S. A1 Strobel, C. A1 Albert, M. A1 Bartha, J.W. A1 Stephan, U. YR 2014 SN 0730-9244 K1 Plasmas K1 Inductors K1 Argon K1 Silicon K1 Semiconductor device modeling K1 Educational institutions SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.2014.7012209 DO https://doi.org/10.1109/PLASMA.2014.7012209 SF ELIB - SuUB Bremen
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