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Three-dimensional simulation of profile evolution in plasma..:

, In: 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT),
Yu, Xiao ; Zhou, Zai Fa ; Li, Wei Hua - p. 1-3 , 2014
Link: https://doi.org/10.1109/ICSICT.2014.7021679