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Vth adjustable self-aligned embedded source/drain Si/Ge nan..:

, In: 2014 IEEE International Electron Devices Meeting,
Yang, Chih-Chao ; Shieh, Jia-Min ; Hsieh, Tung-Ying... - p. 16.3.1-16.3.4 , 2014
Link: https://doi.org/10.1109/IEDM.2014.7047063