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1 Ergebnisse
1
The study of compensative structure assisted convex and con..:
, In:
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
,
Yu-Hsin Lin
;
Yuan-Chieh Cheng
;
Nien-Nan Chu
... - p. 491-493 , 2015
Link:
https://doi.org/10.1109/NEMS.2015.7147475
RT T1 <cTitle>10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems</cTitle>: T1 <Title>The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE)</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7147475&Exemplar=1&LAN=DE A1 Yu-Hsin Lin A1 Yuan-Chieh Cheng A1 Nien-Nan Chu A1 Wensyang Hsu A1 Yu-Hsiang Tang A1 Po-Li Chen A1 Chih-Chung Yang A1 Ming-Hua Hsiao A1 Chien-Nan Hsiao YR 2015 K1 Etching K1 Plasmas K1 Silicon K1 Fabrication K1 Patents K1 Passivation K1 Sulfur hexafluoride K1 Convex and concave corner structures K1 compensative K1 Inductively-Coupled-Plasma Reactive-Ion-Etch (ICP-RIE) SP 491 OP 493 LK http://dx.doi.org/https://doi.org/10.1109/NEMS.2015.7147475 DO https://doi.org/10.1109/NEMS.2015.7147475 SF ELIB - SuUB Bremen
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