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Verification and test system technology for CMOS-MEMS switc..:

, In: 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,
Liu, Peng ; Lou, Wenzhong ; Dai, Ximing. - p. 585-588 , 2015
Link: https://doi.org/10.1109/NEMS.2015.7147497