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A selective gate recess process utilizing MBE-grown In/sub ..:

, In: GaAs IC Symposium. IEEE Gallium Arsenide Integrated Circuit Symposium. 20th Annual. Technical Digest 1998 (Cat. No.98CH36260),
Hanson, A.W. ; Danzilio, D. ; Bacher, K.. - p. 195,196,197 , 1998
Link: https://doi.org/10.1109/GAAS.1998.722668