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Characterization of CMOS-MEMS device for acetone vapor dete..:

, In: 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM),
Rabih, A.A.S. ; Md Khir, M.H. ; Ahmed, A.Y... - p. 1-4 , 2015
Link: https://doi.org/10.1109/RSM.2015.7354966