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Chemical analysis of thin ALD-Al2O3 films and their applica..:
, In:
2015 IEEE SENSORS
,
Perez Ramos, Berni M.
;
Diaz Sanchez, Alejandro
;
Reyes, Joel Molina
- p. 1-3 , 2015
Link:
https://doi.org/10.1109/ICSENS.2015.7370478
RT T1
2015 IEEE SENSORS
: T1
Chemical analysis of thin ALD-Al2O3 films and their applications as pH-sensitive layers in CMOS-compatible Ion-Sensitive Capacitors (ISCAP)
UL https://suche.suub.uni-bremen.de/peid=ieee-7370478&Exemplar=1&LAN=DE A1 Perez Ramos, Berni M. A1 Diaz Sanchez, Alejandro A1 Reyes, Joel Molina YR 2015 K1 Sensitivity K1 Sensor phenomena and characterization K1 Aluminum oxide K1 Chemical sensors K1 Films K1 ion-sensor K1 ALD K1 Al2O3 K1 FTIR K1 pH SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ICSENS.2015.7370478 DO https://doi.org/10.1109/ICSENS.2015.7370478 SF ELIB - SuUB Bremen
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