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Electrothermal MEMS parallel plate rotation for real time s..:

, In: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS),
Jang, Kyung-Won ; Yang, Sung-Pyo ; Baek, Seung-Hwan.. - p. 605-608 , 2016
Link: https://doi.org/10.1109/MEMSYS.2016.7421698