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1 Ergebnisse
1
A parallel MEMS guide mechanism with beam-based motion ampl..:
, In:
Fifth Asia International Symposium on Mechatronics (AISM 2015)
,
Shi, H.L.
;
She, Y.
;
Duan, X.C.
. - p. 1-5 , 2015
Link:
https://doi.org/10.1049/cp.2015.1591
RT T1 <cTitle>Fifth Asia International Symposium on Mechatronics (AISM 2015)</cTitle>: T1 <Title>A parallel MEMS guide mechanism with beam-based motion amplifier</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7488891&Exemplar=1&LAN=DE A1 Shi, H.L. A1 She, Y. A1 Duan, X.C. A1 Su, H.J. YR 2015 K1 nanopositioner K1 flexure mechanism K1 stiffness K1 control K1 kinematic model SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1049/cp.2015.1591 DO https://doi.org/10.1049/cp.2015.1591 SF ELIB - SuUB Bremen
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