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1 Ergebnisse
1
Towards contact integration for III–V/Silicon heterogeneous..:
, In:
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
,
Ghegin, E.
;
Rodriguez, Ph.
;
Nemouchi, F.
... - p. 69-71 , 2016
Link:
https://doi.org/10.1109/IITC-AMC.2016.7507684
RT T1
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
: T1
Towards contact integration for III–V/Silicon heterogeneous photonics devices
UL https://suche.suub.uni-bremen.de/peid=ieee-7507684&Exemplar=1&LAN=DE A1 Ghegin, E. A1 Rodriguez, Ph. A1 Nemouchi, F. A1 Jany, Ch. A1 Brihoum, M. A1 Halimaoui, A. A1 Sagnes, I. A1 Szelag, B. YR 2016 SN 2380-6338 K1 Surface morphology K1 Surface treatment K1 Substrates K1 Surface topography K1 Contacts K1 Surface emitting lasers K1 Metallization K1 Silicon Photonics K1 Heterogeneously integrated III–V laser on Silicon K1 Contact integration SP 69 OP 71 LK http://dx.doi.org/https://doi.org/10.1109/IITC-AMC.2016.7507684 DO https://doi.org/10.1109/IITC-AMC.2016.7507684 SF ELIB - SuUB Bremen
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