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Test structures for residual stress monitoring in the integ..:

, In: 2016 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD),
Alvarez, Carlos Ramon Baez ; Aranda, Monico Linares ; Jacome, Alfonso Torres. - p. 1-4 , 2016
Link: https://doi.org/10.1109/SMACD.2016.7520745