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1 Ergebnisse
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Effct of target poisoning on the growth of interfacial laye..:
, In:
2016 IEEE International Conference on Plasma Science (ICOPS)
,
Lee, Jin Young
;
Kang, Woo Seok
;
Hur, Min
.. - p. 1-1 , 2016
Link:
https://doi.org/10.1109/PLASMA.2016.7534214
RT T1
2016 IEEE International Conference on Plasma Science (ICOPS)
: T1
Effct of target poisoning on the growth of interfacial layer during the initial stage of DC magnetron sputtering deposition
UL https://suche.suub.uni-bremen.de/peid=ieee-7534214&Exemplar=1&LAN=DE A1 Lee, Jin Young A1 Kang, Woo Seok A1 Hur, Min A1 Lee, Jae-Ok A1 Song, Young-Hoon YR 2016 K1 Sputtering K1 Aluminum oxide K1 Silicon K1 Oxidation K1 Magnetic films K1 Solids SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.2016.7534214 DO https://doi.org/10.1109/PLASMA.2016.7534214 SF ELIB - SuUB Bremen
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