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Imaging of strain from deep trenches using X-Ray Diffractio..:
, In:
2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Gambino, J. P.
;
Watanabe, Y.
;
Kanuma, Y.
... - p. 321-325 , 2016
Link:
https://doi.org/10.1109/IPFA.2016.7564309
RT T1
2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Imaging of strain from deep trenches using X-Ray Diffraction Imaging (XRDI)
UL https://suche.suub.uni-bremen.de/peid=ieee-7564309&Exemplar=1&LAN=DE A1 Gambino, J. P. A1 Watanabe, Y. A1 Kanuma, Y. A1 Greenwood, B. A1 Price, D. A1 Suwhanov, A. A1 Hose, S. A1 Whear, O. YR 2016 SN 1946-1550 K1 Failure analysis K1 Integrated circuits K1 Decision support systems K1 Erbium SP 321 OP 325 LK http://dx.doi.org/https://doi.org/10.1109/IPFA.2016.7564309 DO https://doi.org/10.1109/IPFA.2016.7564309 SF ELIB - SuUB Bremen
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