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1 Ergebnisse
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Impacts of back-grinding process parameters on the strength..:
, In:
2016 17th International Conference on Electronic Packaging Technology (ICEPT)
,
Bie, Xiaorui
;
Qin, Fei
;
Zhou, Linfeng
... - p. 1197-1200 , 2016
Link:
https://doi.org/10.1109/ICEPT.2016.7583338
RT T1
2016 17th International Conference on Electronic Packaging Technology (ICEPT)
: T1
Impacts of back-grinding process parameters on the strength of thinned silicon wafer
UL https://suche.suub.uni-bremen.de/peid=ieee-7583338&Exemplar=1&LAN=DE A1 Bie, Xiaorui A1 Qin, Fei A1 Zhou, Linfeng A1 Sun, Jinglong A1 Chen, Pei A1 Wang, Zhongkang YR 2016 K1 Sun K1 Packaging K1 Silicon K1 Silicon wafer K1 Back-grinding K1 Strength SP 1197 OP 1200 LK http://dx.doi.org/https://doi.org/10.1109/ICEPT.2016.7583338 DO https://doi.org/10.1109/ICEPT.2016.7583338 SF ELIB - SuUB Bremen
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