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FinFET prototypes fabricated by aluminium hard mask FIB mil..:
, In:
2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)
,
Leonhardt, Alessandra
;
Petersen Barbosa Lima, Lucas
;
Cioldin, Frederico Hummel
... - p. 1-4 , 2016
Link:
https://doi.org/10.1109/SBMicro.2016.7731324
RT T1
2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)
: T1
FinFET prototypes fabricated by aluminium hard mask FIB milling for fin definition and SiON/TiN/Al gate stack
UL https://suche.suub.uni-bremen.de/peid=ieee-7731324&Exemplar=1&LAN=DE A1 Leonhardt, Alessandra A1 Petersen Barbosa Lima, Lucas A1 Cioldin, Frederico Hummel A1 Puydinger dos Santos, Marcos Vinicius A1 Diniz, Jose Alexandre A1 Manera, Leandro Tiago YR 2016 K1 Logic gates K1 FinFETs K1 Prototypes K1 Aluminum K1 Plasmas K1 Resistance K1 FinFET K1 Focused Ion Beam K1 MOSFET Prototype K1 Nanotechnology SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/SBMicro.2016.7731324 DO https://doi.org/10.1109/SBMicro.2016.7731324 SF ELIB - SuUB Bremen
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