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1 Ergebnisse
1
Experimental study of nanoparticle formation dynamics in HM..:
, In:
2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)
,
Garofano, V.
;
Stafford, L.
;
Gorka, J.
... - p. 1-2 , 2016
Link:
https://doi.org/10.1109/NMDC.2016.7777173
RT T1
2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)
: T1
Experimental study of nanoparticle formation dynamics in HMDSO-Ar asymmetric capacitively-coupled radiofrequency plasma with application to deposition of nanocomposite layers
UL https://suche.suub.uni-bremen.de/peid=ieee-7777173&Exemplar=1&LAN=DE A1 Garofano, V. A1 Stafford, L. A1 Gorka, J. A1 Gaboriau, F. A1 Despax, B. A1 Boulon, J. A1 Joblin, C. A1 Demyk, K. A1 Makasheva, K. YR 2016 K1 Plasmas K1 Nanoparticles K1 Electrons K1 Radio frequency K1 Plasma temperature K1 Discharges (electric) K1 Argon SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/NMDC.2016.7777173 DO https://doi.org/10.1109/NMDC.2016.7777173 SF ELIB - SuUB Bremen
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