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Effective phosphorus deactivation in schottky diodes hydrog..:
, In:
2016 8th International Conference on Modelling, Identification and Control (ICMIC)
,
Belfennache, D.
;
Brihi, N.
;
Madi, D.
- p. 497-502 , 2016
Link:
https://doi.org/10.1109/ICMIC.2016.7804164
RT T1 <cTitle>2016 8th International Conference on Modelling, Identification and Control (ICMIC)</cTitle>: T1 <Title>Effective phosphorus deactivation in schottky diodes hydrogenated in MW-ECR plasma reactor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7804164&Exemplar=1&LAN=DE A1 Belfennache, D. A1 Brihi, N. A1 Madi, D. YR 2016 K1 Phosphorus K1 Hydrogen K1 Silicon K1 Plasmas K1 Schottky diodes K1 Capacitance-voltage characteristics K1 Doping profiles K1 Active donor profile K1 Plasma Hydrogenation K1 hydrogen molecular K1 phosphorus deactivation K1 platelets SP 497 OP 502 LK http://dx.doi.org/https://doi.org/10.1109/ICMIC.2016.7804164 DO https://doi.org/10.1109/ICMIC.2016.7804164 SF ELIB - SuUB Bremen
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