I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Air spacer for 10nm FinFET CMOS and beyond:

, In: 2016 IEEE International Electron Devices Meeting (IEDM),
Cheng, K. ; Surisetty, C. ; Muthinti, R.... - p. 17.1.1-17.1.4 , 2016
Link: https://doi.org/10.1109/IEDM.2016.7838436