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1 Ergebnisse
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Investigation of intrinsic hydrogenated amorphous silicon (..:
, In:
2017 China Semiconductor Technology International Conference (CSTIC)
,
Yu, Min-Lun
;
Hsieh, Yu-Lin
;
Jou, Sheng-Kai
.. - p. 1-3 , 2017
Link:
https://doi.org/10.1109/CSTIC.2017.7919801
RT T1 <cTitle>2017 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Investigation of intrinsic hydrogenated amorphous silicon (a-Si:H) thin films on textured silicon substrate with high quality passivation</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7919801&Exemplar=1&LAN=DE A1 Yu, Min-Lun A1 Hsieh, Yu-Lin A1 Jou, Sheng-Kai A1 Li, Tomi T. A1 Lee, Chien-Chieh YR 2017 K1 Amorphous silicon K1 Radio frequency K1 Electrodes SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC.2017.7919801 DO https://doi.org/10.1109/CSTIC.2017.7919801 SF ELIB - SuUB Bremen
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