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Silicon deposition on 3C-SiC seeds of different orientation:
, In:
2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
,
Yeghoyan, Taguhi
;
Alassaad, Kassem
;
Souliere, Veronique
. - p. 1-1 , 2016
Link:
https://doi.org/10.4028/www.scientific.net/MSF.897.87
RT T1
2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
: T1
Silicon deposition on 3C-SiC seeds of different orientations
UL https://suche.suub.uni-bremen.de/peid=ieee-7921221&Exemplar=1&LAN=DE A1 Yeghoyan, Taguhi A1 Alassaad, Kassem A1 Souliere, Veronique A1 Ferro, Gabriel YR 2016 SN 1662-9752 K1 Silicon K1 Silicon carbide K1 Epitaxial growth K1 Substrates K1 Standards K1 Inductors K1 Focusing K1 3C-SiC K1 Silicon on SiC K1 heteroepitaxy K1 seed orientation K1 CVD SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/MSF.897.87 DO https://doi.org/10.4028/www.scientific.net/MSF.897.87 SF ELIB - SuUB Bremen
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