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1 Ergebnisse
1
Susceptor coating materials applicable for SiC reactor clea..:
, In:
2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
,
Shioda, Kohei
;
Habuka, Hitoshi
;
Ito, Hideki
.. - p. 1-1 , 2016
Link:
https://doi.org/10.4028/www.scientific.net/MSF.897.99
RT T1 <cTitle>2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)</cTitle>: T1 <Title>Susceptor coating materials applicable for SiC reactor cleaning</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7921224&Exemplar=1&LAN=DE A1 Shioda, Kohei A1 Habuka, Hitoshi A1 Ito, Hideki A1 Mitani, Shin-ichi A1 Takahashi, Yoshinao YR 2016 K1 Etching K1 Silicon carbide K1 Inductors K1 Coatings K1 Cleaning K1 Carbon K1 Films K1 epitaxial reactor cleaning K1 chlorine trifluoride gas SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.4028/www.scientific.net/MSF.897.99 DO https://doi.org/10.4028/www.scientific.net/MSF.897.99 SF ELIB - SuUB Bremen
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