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1 Ergebnisse
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Effects of electromagnetic radiation exposure on direct Cu ..:
, In:
2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
,
Song, Jenn-Ming
;
Liang, Sin-Yong
;
Chiang, Po-Hao
... - p. 43-43 , 2017
Link:
https://doi.org/10.23919/LTB-3D.2017.7947439
RT T1 <cTitle>2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)</cTitle>: T1 <Title>Effects of electromagnetic radiation exposure on direct Cu bonding</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7947439&Exemplar=1&LAN=DE A1 Song, Jenn-Ming A1 Liang, Sin-Yong A1 Chiang, Po-Hao A1 Huang, Shang-Kun A1 Chiu, Ying-Ta A1 Tarng, David A1 Hung, Chih-Pin YR 2017 K1 Bonding K1 Electromagnetic radiation K1 Residual stresses K1 Copper K1 Compressive stress K1 Heating systems K1 Atomic measurements SP 43 OP 43 LK http://dx.doi.org/https://doi.org/10.23919/LTB-3D.2017.7947439 DO https://doi.org/10.23919/LTB-3D.2017.7947439 SF ELIB - SuUB Bremen
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