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1 Ergebnisse
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Nested interconnect macro electrical yield improvement for ..:
, In:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Silvestre, Mary Claire
;
He, Ming
;
Mahalingam, Anbu Selvam K M
... - p. 10-14 , 2017
Link:
https://doi.org/10.1109/ASMC.2017.7969189
RT T1
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
Nested interconnect macro electrical yield improvement for advanced triple patterning integration
UL https://suche.suub.uni-bremen.de/peid=ieee-7969189&Exemplar=1&LAN=DE A1 Silvestre, Mary Claire A1 He, Ming A1 Mahalingam, Anbu Selvam K M A1 Child, Craig A1 Roux, Alycia A1 Low, Chun Hui A1 Fisher, Daniel A1 Zhou, Yue A1 Park, DeNeil A1 Karakoy, Mert YR 2017 SN 2376-6697 K1 Etch Iso-Dense CD Bias K1 nested serpentine structures K1 triple patterning (LELELE) SP 10 OP 14 LK http://dx.doi.org/https://doi.org/10.1109/ASMC.2017.7969189 DO https://doi.org/10.1109/ASMC.2017.7969189 SF ELIB - SuUB Bremen
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