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Silicon photonic wafer fabrication for education:

, In: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Lakshminarayanamurthy, Sanjna ; Rummage, Nathan A. ; Mogent, Neville A.... - p. 184-188 , 2017
Link: https://doi.org/10.1109/ASMC.2017.7969226