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Solved: the mystery of bright voltage contrast word-line de..:

, In: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Patterson, Oliver D. ; Hafer, Richard F. ; Pendyala, Sweta... - p. 249-255 , 2017
Link: https://doi.org/10.1109/ASMC.2017.7969239