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1 Ergebnisse
1
Nontraditional post develop inspection and review strategy ..:
, In:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Daino, Michael
;
Jain, Ankit
;
Gao, Weihong
... - p. 405-408 , 2017
Link:
https://doi.org/10.1109/ASMC.2017.7969270
RT T1 <cTitle>2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Nontraditional post develop inspection and review strategy for via defects</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7969270&Exemplar=1&LAN=DE A1 Daino, Michael A1 Jain, Ankit A1 Gao, Weihong A1 Xie, Qian A1 Wojtowecz, Michael A1 Venkatachalam, Panneerselvam YR 2017 SN 2376-6697 K1 Inspection K1 Monitoring K1 Lithography K1 Modulation K1 Qualifications K1 Numerical analysis K1 Production K1 Missing Via K1 BEOL K1 PWQ SP 405 OP 408 LK http://dx.doi.org/https://doi.org/10.1109/ASMC.2017.7969270 DO https://doi.org/10.1109/ASMC.2017.7969270 SF ELIB - SuUB Bremen
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