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Systematic and random defect reduction during the evolution..:

, In: 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295),
Guldi, R. ; Winter, T. ; Sridhar, N.... - p. 2,3,4,5,6,7 , 1999
Link: https://doi.org/10.1109/ASMC.1999.798167