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A new sub-micron trench cell concept in ultrathin wafer tec..:

, In: 2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD),
Jaeger, Christian ; Philippou, Alexander ; VeIlei, Antonio.. - p. 69-72 , 2017
Link: https://doi.org/10.23919/ISPSD.2017.7988895