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Fabrication of nano-scale high aspect ratio ultra sharp tip..:
, In:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
,
Wang, Peng
;
Michael, Aron
;
Chen, Ssu Han
.. - p. 1328-1331 , 2017
Link:
https://doi.org/10.1109/TRANSDUCERS.2017.7994301
RT T1 <cTitle>2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)</cTitle>: T1 <Title>Fabrication of nano-scale high aspect ratio ultra sharp tips for nano-mechanical structures at low thermal budget</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-7994301&Exemplar=1&LAN=DE A1 Wang, Peng A1 Michael, Aron A1 Chen, Ssu Han A1 Chuang, Ian A1 Kwok, Chee Yee YR 2017 SN 2167-0021 K1 Silicon K1 Fabrication K1 Nanowires K1 Electron beams K1 Etching K1 Force K1 Microscopy K1 Nanotips K1 High aspect ratio tips K1 Spindt tips K1 Sharp tips SP 1328 OP 1331 LK http://dx.doi.org/https://doi.org/10.1109/TRANSDUCERS.2017.7994301 DO https://doi.org/10.1109/TRANSDUCERS.2017.7994301 SF ELIB - SuUB Bremen
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