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The influence mechanism of Al2O3 layer and etching depth on..:

, In: 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT),
Li, Peng ; Cao, Yan-Rong ; Dai, Feng... - p. 1059-1061 , 2016
Link: https://doi.org/10.1109/ICSICT.2016.7998650