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Removal of high dose ion-implanted photoresists using dry p..:

, In: 2017 18th International Conference on Electronic Packaging Technology (ICEPT),
Wang, Shuaipeng ; Li, Jianqiang ; Chen, Yanning... - p. 35-37 , 2017
Link: https://doi.org/10.1109/ICEPT.2017.8046402