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A study of coating techniques for ultra-thin film X-TEM sam..:

, In: 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
Shen, Yi Qiang ; Li, Li Hong ; Tee, Irene... - p. 1-4 , 2017
Link: https://doi.org/10.1109/IPFA.2017.8060138