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1 Ergebnisse
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Advanced TEM sample preparation and imaging techniques in s..:
, In:
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Shen, Yi Qiang
;
Zhu, Jie
;
Tahmasebi, Taiebeh
... - p. 1-6 , 2017
Link:
https://doi.org/10.1109/IPFA.2017.8060140
RT T1
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Advanced TEM sample preparation and imaging techniques in semiconductor devices
UL https://suche.suub.uni-bremen.de/peid=ieee-8060140&Exemplar=1&LAN=DE A1 Shen, Yi Qiang A1 Zhu, Jie A1 Tahmasebi, Taiebeh A1 Lee, Kok Wah A1 Tay, Chui Lam A1 Zhao, Si Ping YR 2017 SN 1946-1550 K1 Imaging K1 Lattices K1 Ion beams K1 Milling K1 Image resolution K1 Electron beams K1 Signal resolution SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/IPFA.2017.8060140 DO https://doi.org/10.1109/IPFA.2017.8060140 SF ELIB - SuUB Bremen
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