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EELS applications study in elements characterization for ad..:

, In: 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
Zhou, Jiashi ; Fan, Chunyan ; Wang, Jing... - p. 1-3 , 2017
Link: https://doi.org/10.1109/IPFA.2017.8060170