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1 Ergebnisse
1
High aspect ratio spiral resonators for process variation i..:
, In:
2017 IEEE SENSORS
,
Middelburg, L.M.
;
El Mansouri, B.
;
van Zeijl, H.W.
.. - p. 1-3 , 2017
Link:
https://doi.org/10.1109/ICSENS.2017.8233945
RT T1
2017 IEEE SENSORS
: T1
High aspect ratio spiral resonators for process variation investigation and MEMS applications
UL https://suche.suub.uni-bremen.de/peid=ieee-8233945&Exemplar=1&LAN=DE A1 Middelburg, L.M. A1 El Mansouri, B. A1 van Zeijl, H.W. A1 Zhang, G.Q. A1 Poelma, R.H. YR 2017 K1 Resonators K1 Measurement by laser beam K1 Laser beams K1 Resonant frequency K1 Spirals K1 Frequency measurement K1 Photodiodes K1 MEMS K1 DRIE etching K1 bulk micromachining K1 process variations SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ICSENS.2017.8233945 DO https://doi.org/10.1109/ICSENS.2017.8233945 SF ELIB - SuUB Bremen
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