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1 Ergebnisse
1
Advanced implant application for 7nm and beyond:
, In:
2018 18th International Workshop on Junction Technology (IWJT)
,
Zou, Wei
;
Shim, Kyu-Ha
;
Henry, Todd
- p. 1-1 , 2018
Link:
https://doi.org/10.1109/IWJT.2018.8330278
RT T1 <cTitle>2018 18th International Workshop on Junction Technology (IWJT)</cTitle>: T1 <Title>Advanced implant application for 7nm and beyond</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8330278&Exemplar=1&LAN=DE A1 Zou, Wei A1 Shim, Kyu-Ha A1 Henry, Todd YR 2018 K1 Implants K1 System-on-chip K1 Performance evaluation K1 Reliability K1 Silicon K1 Roads K1 Mobile handsets SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/IWJT.2018.8330278 DO https://doi.org/10.1109/IWJT.2018.8330278 SF ELIB - SuUB Bremen
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