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A Study of Blister Control of AL2O3 Thin Film Deposited by ..:
, In:
2017 IEEE 44th Photovoltaic Specialist Conference (PVSC)
,
Gu Kang, Min
;
In Lee, Jeong
;
Song, Hee-Eun
... - p. 1-3 , 2017
Link:
https://doi.org/10.1109/PVSC.2017.8366608
RT T1 <cTitle>2017 IEEE 44th Photovoltaic Specialist Conference (PVSC)</cTitle>: T1 <Title>A Study of Blister Control of AL2O3 Thin Film Deposited by Plasma-assisted Atomic Layer Deposition after Firing Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8366608&Exemplar=1&LAN=DE A1 Gu Kang, Min A1 In Lee, Jeong A1 Song, Hee-Eun A1 Sang Jeong, Myeong A1 Taek Jeong, Kyung A1 Sik Chang, Hyo YR 2017 K1 Aluminum oxide K1 Passivation K1 Silicon K1 Radio frequency K1 Annealing K1 Hydrogen SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/PVSC.2017.8366608 DO https://doi.org/10.1109/PVSC.2017.8366608 SF ELIB - SuUB Bremen
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