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1 Ergebnisse
1
Low scratch high throughput auto stop slurry:
, In:
2018 China Semiconductor Technology International Conference (CSTIC)
,
Wang, Jinfeng
;
Chang, Juyeon
;
Koh, Jeongdeog
- p. 1-3 , 2018
Link:
https://doi.org/10.1109/CSTIC.2018.8369257
RT T1 <cTitle>2018 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Low scratch high throughput auto stop slurry</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8369257&Exemplar=1&LAN=DE A1 Wang, Jinfeng A1 Chang, Juyeon A1 Koh, Jeongdeog YR 2018 K1 Slurries K1 Three-dimensional displays K1 Planarization K1 Random access memory K1 Throughput K1 Solids K1 Force SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC.2018.8369257 DO https://doi.org/10.1109/CSTIC.2018.8369257 SF ELIB - SuUB Bremen
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