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Physical and Electrical Properties of New Zr Precursors wit..:

, In: 2018 IEEE International Interconnect Technology Conference (IITC),
Lim, Haeng-Don ; Jeon, Sang-Yong ; Chae, Won-Mook... - p. 109-111 , 2018
Link: https://doi.org/10.1109/IITC.2018.8430402