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1 Ergebnisse
1
Problems of and Solutions for Coating Techniques for TEM Sa..:
, In:
2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Pan, Yanlin
;
Zhao, Yuzhe
;
Tan, Pik Kee
... - p. 1-5 , 2018
Link:
https://doi.org/10.1109/IPFA.2018.8452598
RT T1
2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Problems of and Solutions for Coating Techniques for TEM Sample Preparation on Ultra Low-k Dielectric Devices after Progressive-FIB Cross-section Analysis
UL https://suche.suub.uni-bremen.de/peid=ieee-8452598&Exemplar=1&LAN=DE A1 Pan, Yanlin A1 Zhao, Yuzhe A1 Tan, Pik Kee A1 Mai, Zhihong A1 Rivai, Fransiscus A1 Lam, Jeffrey YR 2018 SN 1946-1550 K1 Coatings K1 Dielectrics K1 Insulators K1 Films K1 Silicon K1 Milling K1 Substrates K1 Ultra low-k K1 E-beam damage K1 Coating K1 FIB K1 TEM SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IPFA.2018.8452598 DO https://doi.org/10.1109/IPFA.2018.8452598 SF ELIB - SuUB Bremen
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