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1 Ergebnisse
1
Regularized Phase Reconstruction for Sensing Deep Subwavele..:
, In:
2019 Conference on Lasers and Electro-Optics (CLEO)
,
Zhu, Jinlong
;
Goddard, Lynford L.
- p. 1-2 , 2019
Link:
https://doi.org/10.1364/CLEO_AT.2019.ATh1K.5
RT T1 <cTitle>2019 Conference on Lasers and Electro-Optics (CLEO)</cTitle>: T1 <Title>Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8749878&Exemplar=1&LAN=DE A1 Zhu, Jinlong A1 Goddard, Lynford L. YR 2019 K1 Perturbation methods K1 Sensors K1 Scanning electron microscopy K1 Nanostructures K1 Phase measurement K1 Image reconstruction SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1364/CLEO_AT.2019.ATh1K.5 DO https://doi.org/10.1364/CLEO_AT.2019.ATh1K.5 SF ELIB - SuUB Bremen
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